Skip Navigation
Small Business Innovation Research/Small Business Tech Transfer

Technology Development for High-Actuator-Count MEMS DM Systems

Completed Technology Project

Project Description

Final Summary Chart Image
Boston Micromachines Corporation proposes high-precision deformable mirror (DM) systems with one hundred actuators across the active aperture, corresponding to almost eight thousand actuators in the device’s circular aperture, using an innovative new approach for packaging and integration. The proposed work focuses on a technology gap that NASA has identified as critical for space-based exoplanet imaging: production techniques for small-stroke, high-reliability, high-precision deformable mirror systems. The main objective in this Phase II project is to substantially increase the state-of-the-art for the number of actuators in a compact MEMS DM system using microelectromechanical systems (MEMS) production processes and employing a multiple-layer approach to integrating routing line layers in the device. MEMS DMs will be bonded to custom manufactured printed circuit boards using conductive epoxy bonds and flip-chip alignment based on a new stencil printing process demonstrated in the Phase I project. The proposed work includes testing and evaluation of surface topography of DMs before and after bonding and assessment of actuator yield and reliability. More »

Anticipated Benefits

Project Library

Primary U.S. Work Locations and Key Partners

Technology Transitions

Light bulb

Suggest an Edit

Recommend changes and additions to this project record.