Propulsion systems that provide high power to weight and minimal mass are required for the planned generation of nanospacecraft and nanosatellites. Power-MEMS can provide a low cost, highly scalable production approach to small power systems as well as distributed power systems. However, to achieve the desired efficiencies from the MEMS operating temperatures need to exceed the structural temperature limit of silicon. In conjunction with the MIT Micro-Engine program, many of the technologicalissues for the incorporation of a refractory reinforcement, such as silicon carbide, have already been addressed. Selective deposition of the silicon carbide is believed to address the last remaining processing issues for fabricating selectively reinforced Si/SiC hybrid wafers.