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SBIR/STTR

Topography improvements in MEMS DMs for high-contrast, high-resolution imaging, Phase I

Completed Technology Project

Project Introduction

Topography improvements in MEMS DMs for high-contrast, high-resolution imaging, Phase I
This project will develop and demonstrate an innovative microfabrication process to substantially improve the surface quality achievable in high-resolution continuous membrane MEMS deformable mirrors (DMs). Project specific aims include 2X improvement in small-scale surface flatness in comparison to the current state-of-the-art, and substantial reductions in sub-aperture scale diffractive losses due to actuator print-through, mirror scallop, and etch access hole scatter in continuous membrane ME More »

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This is a historic project that was completed before the creation of TechPort on October 1, 2012. Available data has been included. This record may contain less data than currently active projects.

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