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SBIR/STTR

Ultra High Temperature Capacitive Pressure Sensor, Phase I

Completed Technology Project

Project Introduction

Ultra High Temperature Capacitive Pressure Sensor, Phase I
To improve the working performance, increase efficiency, reduce cost, and track system health status and failure modes of advanced propulsion systems; miniaturized, robust sensing systems for measuring and monitoring physical parameters, such as pressure, would be highly advantageous. Technical challenges for developing reliable sensing systems lie in extremely harsh working conditions the micro sensors must operate. In addition to high temperatures and pressures, these conditions include oxidation, corrosion, thermal shock, fatigue, fouling, and abrasive wear. High temperature (300-1350oC) capacitive pressure sensors are of particular interest due to their inherent suitability for wireless readout schemes. The objective of this proposed work is to develop a capacitive pressure sensor based on SiCN, a new class of high temperature ceramic materials, which possess excellent mechanical and electric properties at high temperatures (up to1600 ÂșC). The Phase I effort will include an evaluation of sensor designs and fabrication concepts, and the experimental evaluation of proof of principle scale prototypes. This technology, which is currently at TRL 2, will be advanced to TRL 4 at the end of Phase I. More »

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This is a historic project that was completed before the creation of TechPort on October 1, 2012. Available data has been included. This record may contain less data than currently active projects.

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