Small Business Innovation Research/Small Business Tech Transfer
Cryogenic MEMS Pressure Sensor, Phase I
Project Description
A directly immersible cryogenic MEMS pressure sensor will be developed. Each silicon die will contain a vacuum-reference and a tent-like membrane. Offsetting thermal effects allow the device to operate over a wide temperature range. Using a patented, proven design the device is capable of continuous low-power operation and provides accuracies as low as 0.002 % of reading.
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Primary U.S. Work Locations and Key Partners
| Organizations Performing Work | Role | Type | Location |
|---|---|---|---|
Glenn Research Center
(GRC)
|
Lead Organization | NASA Center | Cleveland, Ohio |
| Wyoming Silicon, LLC | Supporting Organization | Industry | Sheridan, Wyoming |
Primary U.S. Work Locations
-
Ohio
-
Wyoming
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This is a historic project that was completed before the creation of TechPort on October 1, 2012. Available data has been included. This record may contain less data than currently active projects.