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SBIR/STTR

Cryogenic MEMS Pressure Sensor, Phase I

Completed Technology Project

Project Introduction

Cryogenic MEMS Pressure Sensor, Phase I
A directly immersible cryogenic MEMS pressure sensor will be developed. Each silicon die will contain a vacuum-reference and a tent-like membrane. Offsetting thermal effects allow the device to operate over a wide temperature range. Using a patented, proven design the device is capable of continuous low-power operation and provides accuracies as low as 0.002 % of reading. More »

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