Skip Navigation
Small Business Innovation Research/Small Business Tech Transfer

High-Speed Scanning Interferometer Using CMOS Image Sensor and FPGA Based on Multi-Frequency Phase-Tracking Detection, Phase I

Completed Technology Project
421 views

Project Description

High-Speed Scanning Interferometer Using CMOS Image Sensor and FPGA Based on Multi-Frequency Phase-Tracking Detection, Phase I
In this SBIR, we propose a new type of laser interferometer engine for in-situ large optics inspection and metrology and supporting system platform. The proposed FPGA signal processing concept together with new generation high-speed CMOS image sensor enables high speed (> 1m/sec) and real-time continuous surface profiling with minimum local memory. This transforms the currently available laser interferometer into a sub-nanometer precision instrument with only minor modification while providing easy scalability for large optic surface testing and measurement capability simultaneously. More »

Primary U.S. Work Locations and Key Partners

Light bulb

Suggest an Edit

Recommend changes and additions to this project record.

This is a historic project that was completed before the creation of TechPort on October 1, 2012. Available data has been included. This record may contain less data than currently active projects.

^