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Small Business Innovation Research/Small Business Tech Transfer

Segmented MEMS Mirror Arrays, Phase II

Completed Technology Project

Project Introduction

Segmented MEMS Mirror Arrays, Phase II
The objective of this proposal is to deliver state-of-the-art, bench-top deployable, large-throw and tip/tilt, low cross-talk, high resolution, highly scalable and fast response wavefront control devices (deformable mirror, or DM) based on micro-electro-mechanical (MEMS) fabrication processes. The device consists of Segmented Membrane Arrays (SMA). The design uses highly uniform (both mechanically and optically) arrays of mirror pixels to eliminate the cross talk with adjacent elements, which is usually observed in continuous membrane devices. It opens new opportunities to make ideal deformable mirrors with large-throw and independent addressing capabilities. More »

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This is a historic project that was completed before the creation of TechPort on October 1, 2012. Available data has been included. This record may contain less data than currently active projects.