The envisioned analytic software will facilitate development of new x-ray optics of unprecedented quality with surface slope precision of less than 0.1-0.2 μrad and surface height error of less than 1 nm.1-5 generation. This optics is essential for new generation of beamlines and free electron lasers (FELs). The uniqueness of this expensive optics fabrication creates a requirement to provide the compact characterization for it based on existing metrology data. We will develop theoretical base and software tools to characterize the surface morphology. The Software will capture statistical properties of the surface and enable the user to generate thousands of random statistically equivalent surfaces to use for system performance prediction. Statistical equivalence will be defined in terms of fidelity to spectral properties of initial surface under characterization.
The envisioned analytic software will facilitate development of surface analysis and modeling for a variety of applications. Any application involving an interpolation of spectal analysis of a sparsely sampled surface would benefit. The software can be used for quality control, both front and back end in fabrication of smooth components, for example optics and lithography. The method can help the ongoing effort of seafloor interpolation for cartography. Any application that creates a requirement to provide the compact characterization of surface metrology data and assessment and comparizon of surface properties. We will develop theoretical base and software tools to characterize the surface morphology. The Software will capture statistical properties of the surface and enable the user to generate thousands of random statistically equivalent surfaces to use for assessment and prediction. Statistical equivalence will be defined in terms of fidelity to spectral properties of initial surface under testing and characterization.
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