Multilayer thin films comprised of superconductors, normal metals, and dielectrics will be investigated. Fabrication of nanoporous metals for use as a stable absorber coating in high radiation environments will also be studied. The primary emphasis of this work will be development of the required process control to use the new deposition system to produce reproducible and stable coatings for detector and optical applications. In this effort the following tasks will be addressed: 1) Develop reliable multilayer coatings for transition edge detectors, kinetic inductance films, and optical coatings. 2) Develop novel alloy films by depositing multiple materials simultaneously on test substrate wafers. 3) Characterization of electrical/optical properties and process repeatability.