Our goal is to build a PS etching cell and determine how different fabrication parameters affect its thermal properties. We aim to demonstrate a very low thermal conductivity, capable for use in bolometers. Build an in-house capability to fabricate porous silicon on the detector development lab Study methods for selective etching of porous silicon (ion implantation) to enable structures for MEMS devices and detectors. Test the thermal conductivity of porous silicon
We will work with the University of Maryland to design a single tank etching cell Etch porous silicon under different conditions and develop a method to characterize physical properties. Create fabrication processes that involve ion implantation and silicon-on-insulator wafers. Study the thermal conductivity
The availability of porous silicon for high temperature superconducting infrared detectors will allow for improved performance and higher filling fraction of pixels.
|Organizations Performing Work||Role||Type||Location|
|Goddard Space Flight Center (GSFC)||Lead Organization||NASA Center||Greenbelt, MD|
|The University of Maryland||Supporting Organization||U.S. Government|
A final report document may be available for this project. If you would like to request it, please contact us.