SBIR/STTR
Removing Mid-Spatial Frequency Errors with VIBE, Phase II
Project Introduction
The Optimax VIBE finishing process is a fast (<60 second), full-aperture, conformal polishing process incorporating high frequency motion that rapidly eliminates mid-spatial frequency (MSF) errors created by deterministic polishing. During Phase I, we were able to show feasibility that the Optimax VIBE finishing process was able to reduce the effects of mid-spatial frequency (MSF) errors on flat sub-aperture polished surfaces without negatively affecting the surface figure. With future funding, we anticipate advances this process will result in a cost-effective way to produce ultra-low MSF error curved surfaces for both NASA and non-NASA applications.
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Anticipated Benefits
Non-NASA commercial applications include high energy laser systems, EUV optics (lithography), imaging systems and X-ray synchrotrons. High energy laser applications, such as Inertial Confinement Fusion National Ignition Facility (NIF) at Lawrence Livermore National Laboratory are susceptible to mid-spatial frequency errors. The MSF errors are a source of damaging intensity, specifically in the region of 120μm 33mm. In EUV lithography, flare is a significant problem. Flare is directly associated with mid-spatial frequency error. The mid-spatial frequency errors cause light to scatter into small angles and reduce image contrast. The specific mid-spatial frequency region of interest to the EUV lithography community is between 1μm 2mm. The mid-spatial frequency error scales as 1/(lambda)^2, which causes an increasingly significant problem as the lithography industry heads toward shorter and shorter wavelength systems.
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Primary U.S. Work Locations and Key Partners
| Organizations Performing Work | Role | Type | Location |
|---|---|---|---|
Marshall Space Flight Center
(MSFC)
|
Lead Organization | NASA Center | Huntsville, AL |
Jet Propulsion Laboratory
(JPL)
|
Supporting Organization | NASA Center | Pasadena, CA |
| Optimax Systems, Inc. | Supporting Organization | Industry | Ontario, NY |
Primary U.S. Work Locations
-
Alabama
-
California
-
New York
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Organizational Responsibility
Responsible Mission Directorate:
- Space Technology Mission Directorate (STMD)
Lead Center / Facility:
- Marshall Space Flight Center (MSFC)
Responsible Program:
- SBIR/STTR
Project Management
Program Director:
Program Manager:
Project Managers:
Principal Investigator:
- Jessica Nelson
Project Duration
Start: Jun 2011
End: Jun 2013
Technology Maturity (TRL)
| Start: | 3 |
| Current: | 2 |
| Estimated End: | 4 |
Applied Research
Development
Demo & Test
Technology Areas
Primary:
- TA 8 Science Instruments, Observatories, and Sensor Systems
- TA 8.2 Observatories
- TA 8.2.1 Mirror Systems
Other / Cross-cutting:
- TA 12 Materials, Structures, Mechanical Systems and Manufacturing
- TA 12.4 Manufacturing