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Center Innovation Fund: GSFC CIF

Chemical Mechanical Planarization technology enabling higher performance detectors, multiplexers, and microwave devices for astrophysics missions, Year 1

Completed Technology Project
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Project Description

Chemical Mechanical Planarization technology enabling higher performance detectors, multiplexers, and microwave devices for astrophysics missions, Year 1

Chemical Mechanical Planarization (CMP) is a technique that, among multiple benefits, provides self-alignment that enables the smaller critical feature size critical to the performance of many superconducting devices. This effort builds on an FY18 CIF, in which they leveraged local facilities (at GSFC and NIST, Gaithersburg) to develop CMP recipes for the NASA-specific, unique materials needed to further expand our ability to apply CMP for breakthrough enhancements in astrophysics instruments. The specific goal for FY19 Is to combine FY18 efforts to make a Metallic Magnetic Calorimeter structure with solenoidal geometry for enhanced energy resolution, and to start taking advantage of CMP's ability to make self-aligned structures . This innovation provides opportunities to improve sensitivity and decrease pixel size for x-ray microcalorimeters, simplify wiring, and make new types of superconducting devices or microwave components for multiplexed readout. The technology infusion target will be upcoming APRA proposals.

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Primary U.S. Work Locations and Key Partners

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