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Center Innovation Fund: GSFC CIF

Chemical Mechanical Planarization technology enabling higher performance detectors, multiplexers, and microwave devices for astrophysics missions.

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Project Introduction

Chemical Mechanical Planarization technology enabling higher performance detectors, multiplexers, and microwave devices for astrophysics missions.
The plan is to deposit films and fabricate test structures of Au, Al2O3, and Nb on silicon wafers in the Detector Development Lab at GSFC. The team will use the test wafers to select CMP slurry composition for best results with these materials. The CMP process parameters will be adjusted for optimal uniformity on the test wafers. Deliverables will be test results and process recipes, with the objective of demonstrating proof of feasibility of applying CMP to fabrication of innovative detector geometries. More »

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