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Center Independent Research & Development: GSFC IRAD

Silicon Micromachining for Millimeter- and Submillimeter-Wave Applications

Active Technology Project

Project Introduction

The molecular and atomic transitions observed in the THz frequency range provide a wealth of information for astrophysics, as well as earth and planetary science. As science goals drive coherent guided wave technologies from the microwave into submillimeter devices, manufacturing tolerances are correspondingly tightened. Increasingly, the accuracy achievable by traditional precision metal fabrication techniques is insufficient to reliably define waveguide filter characteristics. In the proposed effort, we plan to use silicon micromachining techniques to demonstrate the fabrication of narrow bandpass filters at 220.5 GHz and 682.5 GHz. This approach will be used for development of future components used in suborbital and satellite instrument systems for THz remote sensing.

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