Small Business Innovation Research/Small Business Tech Transfer
Surface Micromachined Arrays of Transition-Edge Detectors, Phase I
Project Description
An innovative surface micromachining technique is described for the fabrication of closely-packed arrays of transition edge sensor (TES) x-ray microcalorimeters. This technique enables individual TES microcalorimeters to be suspended on a thin membrane for thermal isolation from the bath temperature. The TES detectors are fabricated from normal metal/superconductor bilayers with a transition temperature of around 0.1 K. The proposed surface micromachining technique will simplify the fabrication of closely-packed TES microcalorimeter arrays, which are needed for numerous applications in astronomical x-ray spectroscopy.
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Primary U.S. Work Locations and Key Partners
| Organizations Performing Work | Role | Type | Location |
|---|---|---|---|
Goddard Space Flight Center
(GSFC)
|
Lead Organization | NASA Center | Greenbelt, Maryland |
| STAR Cryoelectronics, LLC | Supporting Organization | Industry | Santa Fe, New Mexico |
Primary U.S. Work Locations
-
Maryland
-
New Mexico
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