A novel material for next generation MEMS and Sensor Devices
Project Description
Our goal is to build a PS etching cell and determine how different fabrication parameters affect its thermal properties. We aim to demonstrate a very low thermal conductivity, capable for use in bolometers. Build an in-house capability to fabricate porous silicon on the detector development lab Study methods for selective etching of porous silicon (ion implantation) to enable structures for MEMS devices and detectors. Test the thermal conductivity of porous silicon
We will work with the University of Maryland to design a single tank etching cell Etch porous silicon under different conditions and develop a method to characterize physical properties. Create fabrication processes that involve ion implantation and silicon-on-insulator wafers. Study the thermal conductivity
More »Anticipated Benefits
The availability of porous silicon for high temperature superconducting infrared detectors will allow for improved performance and higher filling fraction of pixels.
More »Project Library
Primary U.S. Work Locations and Key Partners
| Organizations Performing Work | Role | Type | Location |
|---|---|---|---|
Goddard Space Flight Center
(GSFC)
|
Lead Organization | NASA Center | Greenbelt, Maryland |
| University of Maryland-College Park (UMCP) | Supporting Organization | Academia | College Park, Maryland |
Primary U.S. Work Locations
-
Maryland
Suggest an Edit
This is a historic project that was completed before the creation of TechPort on October 1, 2012. Available data has been included. This record may contain less data than currently active projects.