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Earth Science Technology Office

Development of Immersion Gratings to Enable a Compact Architecture for High Spectral and Spatial Resolution Imaging

Completed Technology Project

Project Introduction

The project is completed using silicon micromachining techniques to produce grooves in 10mm and 30mm diffractive optics. The gratings written on a 10mm think Si substrate are bonded to a Si prism to achieve larger immersed gratings. Optical and scanning electron microscopy is performed to verify completeness of grooves, measure blaze angle, and quantify degree of undercutting and defect frequency. More »

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Technology Maturity (TRL)

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Target Destination

Light bulb

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