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Earth Science

Development of Immersion Gratings to Enable a Compact Architecture for High Spectral and Spatial Resolution Imaging

Completed Technology Project
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Project Description

Project Image   Development of Immersion Gratings to Enable a Compact Architecture for High Spectral and Spatial Resolution Imaging
The project is completed using silicon micromachining techniques to produce grooves in 10mm and 30mm diffractive optics. The gratings written on a 10mm think Si substrate are bonded to a Si prism to achieve larger immersed gratings. Optical and scanning electron microscopy is performed to verify completeness of grooves, measure blaze angle, and quantify degree of undercutting and defect frequency. More »

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